Cavity Resonance Tuning of Asymmetric Fabry-Perot MQW Modulators Following Flip-Chip Bonding to Silicon CMOS
نویسندگان
چکیده
We present a post-integration cavity resonance tuning technique for asymmetric Fabry-Perot MQW modulators flip-chip bonded to silicon CMOS. The process relies on highly selective chemical etching and GaAs surface oxidation. High-quality devices are successfully integrated.
منابع مشابه
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